Mathematical modeling of RF gas discharges in cylindrical chamber

Аuthors

Shishkin A. G.

Abstract

In this paper the numerical study of RF gas discharge plasma behavior in cylindrical chamber is performed in the framework of 2D mathematical model. The model is based on the system of equations consisting of continuity and momentum equation for electrons and ions, electron energy equation and Poissons equation for electric field potential. By the numerical solution the profiles of main plasma parameters for hydrogen and helium are obtained. The developed model was applied for the analysis and prediction of parameters of plasma used for the sterilization of medical instruments.

Keywords:

mathematical modeling, plasma, RF gas discharge, Boltzmann equation.